Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array
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منابع مشابه
Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array
We present an alternative post-processing on a CMOS chip to release a planar microelectrode array (pMEA) integrated with its signal readout circuit, which can be used for monitoring the neuronal activity of vestibular ganglion neurons in newborn Wistar strain rats. This chip is fabricated through a 0.6 μm CMOS standard process and it has 12 pMEA through a 4 × 3 electrodes matrix. The alternativ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2011
ISSN: 1424-8220
DOI: 10.3390/s111110940